Dynamic Aurora PLD with Si and porous Si to prepare ZnFe2O4 Thin films for liquefied petroleum gas sensing
Title
Dynamic Aurora PLD with Si and porous Si to prepare ZnFe2O4 Thin films for liquefied petroleum gas sensing
Subject
Gasoline
Temperature distribution
Chemical industry
Silicon
Liquefied petroleum gas
Iron compounds
Thin films
Porous silicon
Zinc compounds
Film preparation
Pulsed laser deposition
Description
Polycrystalline ZnFe2O4 thin films were deposited on Si and porous Si (PSi) substrates using Dynamic Aurora pulsed laser deposition (PLD in a magnetic field). The average grain sizes of ZnFe2O4/Si and ZnFe2O4/PSi were, respectively, 120 and 48 nm. The ZnFe2O4/PSi thin film resistance was higher than that of ZnFe2O4/Si thin film. For ZnFe2O4/Si and ZnFe2O4/PSi thin films, the sensor response for liquefied petroleum gas was measured as a function of time and temperature. The sensor response of ZnFe2O4/PSi thin film measured at 375 C is higher than that of ZnFe2O4/Si thin film. Results showed a steep initial rise in the temperature dependence of ZnFe2O4 thin films prepared using PLD. The dependence is steeper than that reported for ZnFe2O4 powder or thick and thin films prepared using chemical processing. 2020 Ceramic Society of Japan. All rights reserved.
457-463
128
Publisher
Journal of the Ceramic Society of Japan
Date
2020
Contributor
Ishigami, Hiroki
Kawaguchi, Takahiko
Sakamoto, Naonori
Che, Shenglei
Koshida, Nobuyoshi
Shinozaki, Kazuo
Suzuki, Hisao
Wakiya, Naoki
Type
journalArticle
Identifier
18820743
10.2109/jcersj2.20010
Collection
Citation
“Dynamic Aurora PLD with Si and porous Si to prepare ZnFe2O4 Thin films for liquefied petroleum gas sensing,” Lamar University Midstream Center Research, accessed May 18, 2024, https://lumc.omeka.net/items/show/23980.