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  • Tags: Micro actuator

With the improvement of Micro-Electro-Mechanical Systems(MEMS), which include miniature structure, miniature sensor, actuator, control circuit, communication, and power supply in one or more chips, the Functionally Graded Materials (FGMs) gradually…

With the improvement of Micro-Electro-Mechanical Systems(MEMS), which include miniature structure, miniature sensor, actuator, control circuit, communication, and power supply in one or more chips, the Functionally Graded Materials (FGMs) gradually…
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